Phosphine
phosphine
CAS: 7803-51-2
Molecular Formula: H3P
Phosphine - Names and Identifiers
Phosphine - Physico-chemical Properties
| Molecular Formula | H3P |
| Molar Mass | 34 |
| Density | 0.491 (estimate) |
| Melting Point | -133° |
| Boling Point | −87.5°C(lit.) |
| Water Solubility | 0.26 volumes in H2O (20°C); insoluble hot H2O; slightly soluble alcohol, ether, cuprous chloride solutions [HAW93] [MER06] |
| Vapor Presure | 3905kPa at 25℃ |
| Vapor Density | 1.15 (vs air) |
| Appearance | colorless gas |
| Exposure Limit | TLV-TWA 0.42 mg/m3 (0.3 ppm) (ACGIH and OSHA); STEL 1.4 mg/m3 (1 ppm) (ACGIH); IDLH 200 ppm (NIOSH). |
| Merck | 13,7424 |
| Stability | Stable, but pyrophoric - spontaneously flammable in air. Note the very wide explosion limits. Incompatible with oxidizing agents, halogens, nitric acid. |
| Use | For integrated circuit manufacturing |
Phosphine - Risk and Safety
| Risk Codes | R12 - Extremely Flammable R17 - Spontaneously flammable in air R26 - Very Toxic by inhalation R34 - Causes burns R50 - Very Toxic to aquatic organisms |
| Safety Description | S28 - After contact with skin, wash immediately with plenty of soap-suds. S36/37 - Wear suitable protective clothing and gloves. S45 - In case of accident or if you feel unwell, seek medical advice immediately (show the label whenever possible.) S61 - Avoid release to the environment. Refer to special instructions / safety data sheets. S63 - |
| UN IDs | UN 2199 2.3 |
| WGK Germany | 2 |
| RTECS | SY7525000 |
| Hazard Class | 2.3 |
Phosphine - Upstream Downstream Industry
| Raw Materials | Phosphorous acid |
Phosphine - Reference Information
| NIST chemical information | information provided by: webbook.nist.gov (external link) |
| EPA chemical substance information | information provided by: ofmpeb.epa.gov (external link) |
| Use | for integrated circuit manufacturing |
| production method | 1. A 3L four-necked flask was fitted with a hydrogen introduction tube, a dropping funnel, a reflux condenser and a thermometer, respectively. Above the condenser, a cold trap for cooling, a drying tube filled with solid KOH, four cold traps for gas traps and a cold trap for gas fractionation are connected in sequence, and the fractionation of each cold trap is regulated by a pressure gauge. The hydrogen used was cooled to -180 ° C., filled with a cold trap of activated carbon, and then deoxygenated by overload platinum asbestos. The flask was charged with 1/3 white phosphorus, followed by dropwise addition of a dilute solution of KOH, purging the air in the system with hydrogen, and heating to 60 °c. The resulting gas and water vapor, together with the rapid hydrogen flow, are passed through a reflux condenser tube, which can remove most of the water after drying. The remaining moisture is separated in the subsequent cold trap. The temperatures of the cold traps were:-90 °c (1),-100 °c (2),-180 °c (3, 4). Therefore, P2H4 mainly agglutinate in 1,2, PH3 condensed in 3,4. The pH 3 was again fractionated from 3,4 and the lowest boiling fraction was taken. At the end of the experiment, the contents of the flask had to be cooled in a hydrogen stream, and the pH 3 in the whole system was removed by the hydrogen stream. The phosphorus in the flask was washed with water to be completely free of alkali. 2. Mix the granulated iodinated and glass pieces in a three-necked round-bottomed flask, and drip the potassium hydroxide solution from the dropping funnel. Very pure PH3 can be discharged. If the base is added very slowly or not, there is a possibility of incorporation of P2H4. |
| category | hazardous gas |
| toxicity grade | highly toxic |
| Acute toxicity | inhalation-rat LC50: 11 PPM/4 hours; Inhalation-mouse LCL0:380 mg/m3/2 h |
| explosive hazard characteristics | open flame mixed with air, thermal explosion |
| flammability hazard characteristics | open flame, combustible under heat; Toxic phosphorus oxide smoke from combustion |
| storage and transportation characteristics | The warehouse is ventilated and dried at low temperature; Light loading and light unloading; And oxygen, separate storage of |
| fire extinguishing agent | water mist, carbon dioxide, foam |
| Occupational Standard | TWA 0.4 mg/m3; Tel 1 mg/m3 |
| DOT Classification | 2.3, Hazard Zone A (Gas poisonous by inhalation) |
| toxic substance data | information provided by: pubchem.ncbi.nlm.nih.gov (external link) |
| immediate life-and health-threatening concentrations | 50 ppm |
Last Update：2024-04-10 22:29:15
