Name | Hafnium-2,4-pentanedionate |
Synonyms | HAFNIUM ACETYLACETONATE Hafnium-2,4-pentanedionate HAFNIUM 2,4-PENTANEDIONATE Hafnium 2,4-pentanedionate Hafnium(Ⅳ) acetylacetonate Hafnium (IV) acetylacetonate HAFNIUM (IV) ACETYLACETONATE HAFNIUM(IV) 2,4-PENTANEDIONATE TETRAKIS(ACETYLACETONATO)HAFNIUM(IV) 1-[(4-methylphenyl)sulfonyl]-1H-pyrrole hafnium tetrakis[(2Z)-4-oxopent-2-en-2-olate] |
CAS | 17475-67-1 |
EINECS | 237-861-9 |
InChI | InChI=1/4C5H8O2.Hf/c4*1-4(6)3-5(2)7;/h4*3,6H,1-2H3;/q;;;;+4/p-4/b4*4-3- |
Molecular Formula | C20H28HfO8 |
Molar Mass | 574.92 |
Melting Point | 193°C |
Boling Point | 82°C/.001mmHg |
Water Solubility | Insoluble in water. |
Appearance | Powder |
Color | white to off-white |
Exposure Limit | ACGIH: TWA 0.5 mg/m3NIOSH: IDLH 50 mg/m3; TWA 0.5 mg/m3 |
Storage Condition | Room Temprature |
Sensitive | 4: no reaction with water under neutral conditions |
MDL | MFCD00044997 |
Physical and Chemical Properties | White powder. Soluble in benzene and carbon tetrachloride. |
Risk Codes | 36/37/38 - Irritating to eyes, respiratory system and skin. |
Safety Description | S26 - In case of contact with eyes, rinse immediately with plenty of water and seek medical advice. S36/37/39 - Wear suitable protective clothing, gloves and eye/face protection. |
TSCA | No |
introduction | hafnium acetylacetonate is a white crystalline powder, easily soluble in conventional organic solvents such as methanol, ethanol, chloroform, benzene, toluene, ether, etc., and hydrolyzed in water. Its sublimation temperature is 193°C, and it is an ideal precursor for MOCVD (metal organic chemical vapor deposition) to prepare HfO2 coatings and films. As early as 2070s, M. Balog prepared Hf (acac)4 as the precursor. High purity HfO2 thin films. |
physical and chemical properties | white powder. Soluble in benzene and carbon tetrachloride. |
application | HfO2 thin film prepared with Hf (acac)4 as precursor has excellent physical and chemical properties such as high melting point (about 2758°C) and high dielectric constant (about 25), and has wide application prospects in high temperature protective coatings, optical coatings, gate dielectric materials, sensors and other fields. Especially because HfO2 has high k value, wide band gap (5. 7ev), good thermodynamic stability and good lattice matching characteristics in contact with Si, it is an ideal compound to replace traditional SiO2 gate dielectric materials. |
Preparation | Hafnium acetylacetonate is a complex, which is white solid. It is the main hafnium complex of acetylacetone. It can be made of hafnium tetrachloride., Acetylacetone and alkali to prepare. |
Production method | Dissolve HfO2 in hydrofluoric acid, evaporate it with nitric acid to dry, dissolve solid substances in water to prepare an aqueous solution of metal salt. According to the composition of Hf(acac)4, the stoichiometric acetylacetone is dissolved in benzene to prepare an organic solution of acetylacetone. Mix the above aqueous solution and organic solution, and slowly add dilute NaOH aqueous solution dropwise under intense stirring to make the pH value of the solution reach an appropriate value (usually 5~7). The complex precipitates from the organic phase. Then recrystallized with anhydrous benzene or other organic solvents. |