Molecular Formula | C12H10Co2O6 |
Molar Mass | 368.07 |
Boling Point | 52°C / 0.8 |
Storage Condition | 2-8℃ |
Use | Application (3, 3-dimethyl-1-butyne) hexacarbonyl cobalt is an important precursor for the preparation of cobalt metal, cobalt nitride, Cobalt silicide, etc, in particular for the application of cobalt barrier/liner, co-capping and eutectic seed layers, there are excellent properties. In the case of the barrier layer and the seed layer, the cobalt film exhibits high conductivity for subsequent seed formation and plating steps. |
Raw Materials | 3,3-Dimethyl-1-butyne |
boiling point | 52°C / 0.8 |
morphology | liquid |
color | dark red |
sensitivity | air sensitive |
(3, 3-dimethyl-1-butyne) dicobalt hexacarbonyl (CCTBA) is one of several cobalt-containing CVD/ALD precursors used to manufacture important functional layers of equipment.