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Phosphine - Names and Identifiers

Name phosphine
Synonyms GAS EX-B
phosphine
phosphorushydride
phosphorus hydride
hydrogen phosphide
Phosphorus hydride
Phosphorwasserstoff
rcrawastenumberp096
phosphorustrihydride
phosphoroustrihydride
Phosphorus trihydride
Rcra waste number P096
Phosphine phosphorated hydrogen
CAS 7803-51-2
EINECS 232-260-8
InChI InChI=1/H3P/h1H3

Phosphine - Physico-chemical Properties

Molecular FormulaH3P
Molar Mass34
Density0.491 (estimate)
Melting Point-133°
Boling Point−87.5°C(lit.)
Water Solubility0.26 volumes in H2O (20°C); insoluble hot H2O; slightly soluble alcohol, ether, cuprous chloride solutions [HAW93] [MER06]
Vapor Presure3905kPa at 25℃
Vapor Density1.15 (vs air)
Appearancecolorless gas
Exposure LimitTLV-TWA 0.42 mg/m3 (0.3 ppm) (ACGIH and OSHA); STEL 1.4 mg/m3 (1 ppm) (ACGIH); IDLH 200 ppm (NIOSH).
Merck13,7424
StabilityStable, but pyrophoric - spontaneously flammable in air. Note the very wide explosion limits. Incompatible with oxidizing agents, halogens, nitric acid.
UseFor integrated circuit manufacturing

Phosphine - Upstream Downstream Industry

Raw MaterialsPhosphorous acid

Phosphine - Reference Information

cylinders for combustion-supporting gases
NIST chemical information information provided by: webbook.nist.gov (external link)
EPA chemical substance information information provided by: ofmpeb.epa.gov (external link)
Use for integrated circuit manufacturing
production method 1. A 3L four-necked flask was fitted with a hydrogen introduction tube, a dropping funnel, a reflux condenser and a thermometer, respectively. Above the condenser, a cold trap for cooling, a drying tube filled with solid KOH, four cold traps for gas traps and a cold trap for gas fractionation are connected in sequence, and the fractionation of each cold trap is regulated by a pressure gauge. The hydrogen used was cooled to -180 ° C., filled with a cold trap of activated carbon, and then deoxygenated by overload platinum asbestos. The flask was charged with 1/3 white phosphorus, followed by dropwise addition of a dilute solution of KOH, purging the air in the system with hydrogen, and heating to 60 °c. The resulting gas and water vapor, together with the rapid hydrogen flow, are passed through a reflux condenser tube, which can remove most of the water after drying. The remaining moisture is separated in the subsequent cold trap. The temperatures of the cold traps were:-90 °c (1),-100 °c (2),-180 °c (3, 4). Therefore, P2H4 mainly agglutinate in 1,2, PH3 condensed in 3,4. The pH 3 was again fractionated from 3,4 and the lowest boiling fraction was taken. At the end of the experiment, the contents of the flask had to be cooled in a hydrogen stream, and the pH 3 in the whole system was removed by the hydrogen stream. The phosphorus in the flask was washed with water to be completely free of alkali. 2. Mix the granulated iodinated and glass pieces in a three-necked round-bottomed flask, and drip the potassium hydroxide solution from the dropping funnel. Very pure PH3 can be discharged. If the base is added very slowly or not, there is a possibility of incorporation of P2H4.
category hazardous gas
toxicity grade highly toxic
Acute toxicity inhalation-rat LC50: 11 PPM/4 hours; Inhalation-mouse LCL0:380 mg/m3/2 h
explosive hazard characteristics open flame mixed with air, thermal explosion
flammability hazard characteristics open flame, combustible under heat; Toxic phosphorus oxide smoke from combustion
storage and transportation characteristics The warehouse is ventilated and dried at low temperature; Light loading and light unloading; And oxygen, separate storage of
fire extinguishing agent water mist, carbon dioxide, foam
Occupational Standard TWA 0.4 mg/m3; Tel 1 mg/m3
DOT Classification2.3, Hazard Zone A (Gas poisonous by inhalation)
toxic substance data information provided by: pubchem.ncbi.nlm.nih.gov (external link)
immediate life-and health-threatening concentrations 50 ppm
Last Update:2024-04-10 22:29:15
Phosphine
Supplier List
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Phosphine
Methoxynitroaniline
ASISCHEM B51602
162012-71-7
BALSAM CANADA, FILTERED FOR MICROSCOPY
CS-441
cobalt,cyclohexanecarboxylic acid
Azoxybenzene
Raw Materials for Phosphine
Phosphorous acid
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