Name | Palladium 1,1,1,5,5,5-hexafluoroacetylacetonate |
Synonyms | PALLADIUM HEXAFLUOROPENTANEDIONATE Palladium hexafluoropentanedionate Palladium(II) hexafluoroacetylacetonate PALLADIUM(II) HEXAFLUOROACETYLACETONATE PALLADIUM HEXAFLUORO-2,4-PENTANEDIONATE Palladium 1,1,1,5,5,5-hexafluoroacetylacetonate PALLADIUM-1,1,1,5,5,5-HEXAFLUORO-2,4-PENTANEDIONATE PALLADIUM (II) 1,1,1,5,5,5-HEXAFLUORO 2,4-PENTANEDIONATE bis(1,1,1,5,5,5-hexafluoropentane-2,4-dionato-O,O')palladium palladium(2+) bis[(2Z)-1,1,1,5,5,5-hexafluoro-4-oxopent-2-en-2-olate] |
CAS | 64916-48-9 |
EINECS | 265-271-1 |
InChI | InChI=1/2C5H2F6O2.Pd/c2*6-4(7,8)2(12)1-3(13)5(9,10)11;/h2*1,12H;/q;;+2/p-2/b2*2-1- |
Molecular Formula | C10H2F12O4Pd |
Molar Mass | 520.52 |
Melting Point | 100°C |
Boling Point | 70°C 70mm |
Flash Point | 22.8°C |
Vapor Presure | 10.3mmHg at 25°C |
Appearance | Powder |
Specific Gravity | 2.404 |
Color | yellow |
Storage Condition | Inert atmosphere,2-8°C |
Sensitive | 4: no reaction with water under neutral conditions |
MDL | MFCD00015709 |
Use | Used for redox metal displacement reactions to optimize the chemical vapor deposition alloying process for copper. It is also used for simultaneous etching of copper and deposition of palladium, thus being applied to ultra-large-scale integrated equipment. |
Hazard Symbols | Xi - Irritant![]() |
Risk Codes | 36/37/38 - Irritating to eyes, respiratory system and skin. |
Safety Description | S26 - In case of contact with eyes, rinse immediately with plenty of water and seek medical advice. S36 - Wear suitable protective clothing. |
WGK Germany | 3 |
TSCA | No |
production method | 4.15g(20mmol) Hexafluoroacetylacetone was mixed with 20mL 1mol/L sodium hydroxide solution and stirred, preparation of Hexafluoroacetylacetone sodium solution. 2.94g(10mmol) of Na2PdCl4 was dissolved in 15ml of water and added to the above solution of sodium hexafluoroacetylacetonate. After stirring for 1H, the crude Palladium hexafluoroacetylacetonate product was collected by filtration, washed with water, and dried in the presence of anhydrous cacl2. The crude product was dissolved in a minimum amount of hot n-hexane and the filtered solution was cooled to -78 °c to give a yellow refined product. The product can be further purified by vacuum sublimation. Yield 2.2g(42%). |