7803-62-5
Silane
CAS: 7803-62-5
Molecular Formula: H4Si
7803-62-5 - Names and Identifiers
| Name | Silane |
| Synonyms | SiH4 Silane Silicane Monosilane flots100sco tetrahydrure silicon hydride Silicon hydride Silaneinnitrogen tetrahydruredesilicium Silicon hydride (SiH4) |
| CAS | 7803-62-5 |
| EINECS | 232-263-4 |
| InChI | InChI=1/H4Si/h1H4 |
7803-62-5 - Physico-chemical Properties
| Molecular Formula | H4Si |
| Molar Mass | 32.12 |
| Density | 1.114g/mLat 25°C(lit.) |
| Melting Point | -185 °C |
| Boling Point | -112 °C |
| Water Solubility | decomposed by H2O; insoluble alcohol, benzene [HAW93] |
| Vapor Presure | 100kPa at 20℃ |
| Vapor Density | 1.1 (vs air) |
| Appearance | colorless gas |
| Specific Gravity | 0.680 |
| Exposure Limit | TLV-TWA 5 ppm (6.5 mg/m3) (ACGIH). |
| Merck | 13,8562 |
| Sensitive | 10: reacts extremely rapidly with moisture and oxygen - may be pyrophoric - sealed system required |
| Use | For integrated circuit manufacturing, solar cells, coating reflective glass |
7803-62-5 - Risk and Safety
| Risk Codes | R12 - Extremely Flammable R17 - Spontaneously flammable in air R20 - Harmful by inhalation |
| Safety Description | S9 - Keep container in a well-ventilated place. S16 - Keep away from sources of ignition. S33 - Take precautionary measures against static discharges. S36/37/39 - Wear suitable protective clothing, gloves and eye/face protection. |
| UN IDs | UN 2203 2.1 |
| WGK Germany | 1 |
| RTECS | VV1400000 |
| TSCA | Yes |
| Hazard Class | 2.1 |
7803-62-5 - Upstream Downstream Industry
| Raw Materials | Fumes, silica Ammonium chloride Magnesium |
7803-62-5 - Reference Information
| EPA chemical substance information | information provided by: ofmpeb.epa.gov (external link) |
| Application | Silicon tetrahydride is widely used in electronics industry, energy industry, glass industry, chemical industry and high-tech fields and other industries and fields, which are mainly used for the production of liquid crystal TFT, solar cells, semiconductors, photoreceptor materials. In recent years, due to the rapid development of China's integrated circuit industry, ultra-large-scale or large-scale integrated circuits have a large space for development in the state, which will make the consumption of silicon tetrahydride growing. At the same time, as the prosperity of the solar energy market will continue, it is predicted that from 2010 to 2020, the Global Silicon tetrahydride market will grow at an average annual rate of 20%. Silicon tetrahydride is an important special gas, is an important indicator of a national gas industry is advanced. As a large country with rapid economic development, China consumes nearly 4000 tons of polycrystalline silicon per year, and the consumption of silicon tetrahydride is about 200 to 300 tons per year. |
| Applications | used in the manufacture of integrated circuits, solar cells, reflective glass coating, etc. Used in the manufacture of integrated circuits, solar cells, coated reflective glass, etc. |
| category | hazardous gas |
| toxicity grade | poisoning |
| Acute toxicity | inhalation-rat LC50: 9600 PPM/4 hours; Inhalation-mouse LCL0: 9600 PPM/4 h |
| explosive hazard characteristics | mixture explosive with Air |
| flammability hazard characteristics | flammable; Thermal decomposition of toxic silicon and flammable hydrogen; contact with liquid to prevent scald |
| storage and transportation characteristics | The warehouse is ventilated and dried at low temperature; Stored separately from oxidant and halogen |
| fire extinguishing agent | water, foam, carbon dioxide mist |
| Occupational Standard | TLV-TWA 7 mg/m3 |
| DOT Classification | 2.1 (Flammable gas) |
| toxic substance data | information provided by: pubchem.ncbi.nlm.nih.gov (external link) |
Last Update：2024-07-11 10:53:45
7803-62-5 - Nature
Open Data Verified Data
A colorless toxic gas which is malodorous at normal temperature and pressure. d-185 (liquid) 0. 68; About -200 °c curing, melting point -185 °c, boiling point -112 °c. Stable at room temperature, heated to 400 deg C when completely decomposed into silicon and hydrogen. Flammable, explosive, explosive combustion in air or halogen gas. Reaction with CC14 and metal halide. Slow decomposition in water, almost insoluble in ethanol, ether, benzene, chloroform and carbon tetrachloride.
Last Update：2024-01-02 23:10:35
7803-62-5 - Preparation Method
Open Data Verified Data
low temperature adsorption continuous liquefaction distillation purification process. Silicon-magnesium alloy is used to react with ammonia bromide in liquid ammonia to produce silane, and then the product can be obtained after low temperature adsorption, continuous liquefaction and rectification purification.
Last Update：2022-01-01 08:53:52
7803-62-5 - Use
Open Data Verified Data
is the semiconductor industry in monocrystalline silicon, polycrystalline silicon epitaxial wafer and silicon dioxide, silicon nitride, phosphorus silicon glass chemical vapor deposition process of silicon source, and is widely used in solar cells, Silicon copying machine drum, photoelectric sensor, production and development of optical fiber and special glass.
Last Update：2022-01-01 08:53:52
7803-62-5 - Safety
Open Data Verified Data
eyes were irritated by silane exposure, and inhalation resulted in Head Pain, Nausea, mucosal and respiratory irritation. The threshold limit for exposure to silane in an occupational environment has an 8-hour time-weighted average (TLV-TWA) of 5 × 10-6, as determined by the American Conference of Government Industrial Hygienists (ACGIH), and adopted by the United States Occupation Safety and the Health Administration (OSHA). Protection should be provided during use. Store in a dry, cool, ventilated warehouse. Cylinders should be stored upright and fixed. To protect the cylinder against extreme temperatures and the effects of weather. It is not allowed to be mixed with flammable products and oxidants, and kept away from fire source.
Last Update：2022-01-01 08:53:53
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