Name | Silanediamine, N,N,N',N'-tetraethyl- |
Synonyms | BDEAS BIS(DIETHYLAMINO)SILANE bis(diethylamino)dihydrosilane Bis(diethylamino) Silane Liquid SilanediaMide, N,N,N',N'-tetraethyl Silanediamine, N,N,N',N'-tetraethyl- |
CAS | 27804-64-4 |
Molecular Formula | C8H22N2Si |
Molar Mass | 174.36 |
Density | 0.804 |
Boling Point | 70°C (30mm) |
Appearance | liquid |
Specific Gravity | 0.804 |
Color | colorless |
pKa | 10.31±0.70(Predicted) |
Sensitive | air sensitive, moisture sensitive |
Use | Bis (diethylamino) silane (BDEAS) can be used as a precursor material for ALD films. |
Preparation | Currently, as a manufacturing method of dialkylaminosilane, in the method of synthesis by the reaction of chlorosilane and dialkylamine, in addition to the target dialkylaminosilane In addition, there are also a large number of by-products of dialkylamine hydrochloride. Therefore, when obtaining the target dialkylaminosilane, it is necessary to prevent the reduction of volumetric efficiency caused by a large amount of solvent, so as to manufacture cheaply and in large quantities. As a solvent for the reaction of dialkylamine and chlorosilane, an aprotic polar solvent with high solubility for the hydrochloride and metal chloride of dialkylamine by-produced in the reaction is used, and dialkylaminosilane has high solubility and is difficult to dissolve straight-chain hydrocarbons or branched hydrocarbons of halogen compounds, so that dialkylaminosilane with low halogen content can be produced with high volume efficiency. Rectification is carried out, which can obtain high-quality dialkylaminosilanes with low halogen content (chlorine). Bis (diethylamino) silane (BDEAS) is used for refining in existing patents and literature technologies. Most of them use rectification methods, and the purity of bis (diethylamino) silane is difficult to exceed 99.99%. |