Boron trichloride
Boron trichloride
CAS: 10294-34-5
Molecular Formula: BCl3
Boron trichloride - Names and Identifiers
| Name | Boron trichloride |
| Synonyms | trichloroborane Boron trichloride Boron trichloride solution boron trichloride cyl. with 5 kg (~net) |
| CAS | 10294-34-5 |
| EINECS | 233-658-4 |
| InChI | InChI=1/B.3ClH/h;3*1H/q+3;;;/p-3 |
Boron trichloride - Physico-chemical Properties
| Molecular Formula | BCl3 |
| Molar Mass | 117.17 |
| Density | 1.326 g/mL at 25 °C |
| Melting Point | -107℃ |
| Boling Point | 12.5 °C(lit.) |
| Flash Point | 84 °F |
| Water Solubility | decomposes |
| Vapor Presure | 29.72 psi ( 55 °C) |
| Vapor Density | 4.05 (vs air) |
| Appearance | White solution |
| Storage Condition | 2-8°C |
| Stability | Unstable. Incompatible with metals. Reacts violently with water. Reacts vigorously with aniline, phosphine, dinitrogen tetroxide. Fumes in moist air. |
| Physical and Chemical Properties | Boron trichloride, chemical formula BCl3. Molecular weight 117.11. Colorless liquid with strong odor. Than air. Do not burn in the air. Smoke in humid air. Melting point -107.3 ℃, boiling point 12.5 ℃, relative density 1.34912, refractive index 1.41954. Hydrolyzed in water to produce hydrogen chloride and boric acid. In case of ethanol, it decomposes. And metal chlorides, non-metallic chlorides and hydrides can form coordination compounds. It can react with many organic substances to form various organic borides. The conductivity of liquid boron trichloride is very small, and when it is used as a solvent, there is no tendency to ionize salts and strong acids. |
| Use | Used as a doping source of semiconductor silicon, organic synthesis catalyst; Can also be used for the preparation of high purity boron and organic boron compounds |
Boron trichloride - Risk and Safety
| Hazard Symbols | F - Flammable T+ - Very toxic  N - Dangerous for the environment  |
| Risk Codes | R11 - Highly Flammable R14 - Reacts violently with water R26/28 - Very toxic by inhalation and if swallowed. R34 - Causes burns R51/53 - Toxic to aquatic organisms, may cause long-term adverse effects in the aquatic environment. R62 - Possible risk of impaired fertility R65 - Harmful: May cause lung damage if swallowed R67 - Vapors may cause drowsiness and dizziness |
| Safety Description | S1 - Keep locked up. S16 - Keep away from sources of ignition. S26 - In case of contact with eyes, rinse immediately with plenty of water and seek medical advice. S36/37/39 - Wear suitable protective clothing, gloves and eye/face protection. S38 - In case of insufficient ventilation, wear suitable respiratory equipment. S45 - In case of accident or if you feel unwell, seek medical advice immediately (show the label whenever possible.) S61 - Avoid release to the environment. Refer to special instructions / safety data sheets. S8 - Keep container dry. |
| UN IDs | UN 1741 |
| WGK Germany | 3 |
| RTECS | ED1925000 |
| FLUKA BRAND F CODES | 10-21 |
| TSCA | Yes |
| HS Code | 28121049 |
| Hazard Class | 2.3 |
| Packing Group | II |
| Toxicity | Very toxic |
Boron trichloride - Upstream Downstream Industry
Boron trichloride - Nature
Open Data Verified Data
colorless and transparent liquid. Relative density 1. 35 (12 ℃). Melting Point 107 °c. Boiling point 12.5 °c. The critical pressure is 390 kPa, the heat of vaporization is 23. 77kJ/mol, and the heat of fusion is 2 10 kJ/mol. The vapor pressures were 0.53kPa(-80 ℃), 8.9kPa (40 ℃) and 63. 5kPa (0 ℃). Water decomposition of hydrogen chloride and boric acid, and give off a lot of heat. Smoke is generated by hydrolysis in moist air. Boron trichloride has strong reaction ability, can generate a variety of coordination compounds, and has high thermodynamic stability, but under the action of discharge, it will decompose to form low-cost boron chloride. In the atmosphere, the heating of boron trichloride can react with glass and ceramics, and can also react with many organic compounds to form various organic boron compounds.
Last Update：2024-01-02 23:10:35
Boron trichloride - Preparation Method
Open Data Verified Data
purified boron trichloride is used as a raw material, and purified by adsorption and distillation to obtain high-purity boron trichloride.
Last Update：2022-01-01 08:54:43
Boron trichloride - Use
Open Data Verified Data
It is used for diffusion, doping, dry etching and other processes in silicon semiconductor devices and integrated circuits in the electronic industry. It is also used for the preparation of high purity boron, boron nitride, boron carbide and other ceramic materials and organic Boride, and also for the refining and purification of metals and the manufacture of optical fibers and heat resistant coatings.
Last Update：2022-01-01 08:54:43
Boron trichloride - Safety
Open Data Verified Data
rats inhaled LC5o for 1H: 127l mg/m3. Boron trichloride is a corrosive liquid that irritates the eyes, skin, and respiratory system when contacted. The liquid burns the eyes and skin. The operator must wear special protective clothing for the whole body. If the skin, eyes and so on are accidentally contacted, rinse with water immediately and send them to the hospital for treatment if they have burns. Store in a cool, dry, ventilated warehouse. Stay away from fires and heat sources. Isolation storage and transportation of organic matter, combustible materials, glass and siliceous articles, water-containing substances and edible raw materials. When fire occurs, use cement or sand to put out the fire. Do not use water or foam fire retardants.
Last Update：2022-01-01 08:54:44
Boron trichloride - Introduction
melting point & minus;107°C(lit.)
Boiling point 12.5°C(lit.)
Density 1.326g/mL at 25 c
Vapor density 4.05 (vs air)
Vapor pressure 29.72 psi (55°C)
Flash point 84 °F
Storage conditions 2-8°C
Solubility Miscible with dichloromethane, ethanol, carbon tetrachloride, diethyl ether, dimethyl formamide, aromatic solvents, saturated and halogenated hydrocarbon.
Morphological Solution
Color White
Water solubility decomposes
Sensitivity Moisture Sensitive
Merck 14,1348
Stability Unstable. Incompatible with metals. Reacts violently with water. Reacts vigorously with aniline, phosphine, dinitrogen tetroxide. Fumes in moist air.
Physical and chemical properties boron trichloride, chemical formula BCl3. Molecular weight 117.11. Colorless liquid with strong odor. Than air. Do not burn in the air. Smoke in humid air. Melting point -107.3 ℃, boiling point 12.5 ℃, relative density 1.34912, refractive index 1.41954. Hydrolyzed in water to produce hydrogen chloride and boric acid. In case of ethanol, it decomposes. And metal chlorides, non-metallic chlorides and hydrides can form coordination compounds. It can react with many organic substances to form various organic borides. The conductivity of liquid boron trichloride is very small, and when it is used as a solvent, there is no tendency to ionize salts and strong acids.
Boron trichloride
High-purity boron trichloride is mainly used for plasma dry etching and diffusion doping in the manufacturing process of (silicon) semiconductor devices. At high temperatures, boron impurities are decomposed to diffuse into silicon to form P-type semiconductors. It can also be used for Al, Dry etching of materials such as MoSi2, TaSi2, TiSi2, WSi, etc.; as a catalyst for boron carrier gas and some organic reactions; when refining magnesium, zinc, aluminum, and copper alloys, nitrogen, carbon, and oxygen compounds are removed from dissolved metals.
preparation method: obtained by the reaction of boron trifluoride and aluminum chloride in the laboratory; When preparing a large amount, dehydrated borax and charcoal can be heated in a chlorine stream at a temperature of 400~700 ℃.
Uses: Used in the production of high purity boron and boron nitride, borane compounds, and used as a fluxing agent and organic synthesis catalyst for silicate decomposition.
Toxic non-flammable gas, highly reactive, explosive decomposition in water, and metal, organic matter, etc. can react violently, when in case of moisture, it is highly corrosive to most metals, and can also corrode glass, etc. Both hydrogen chloride and boron are toxic. In the humid air, it can form white corrosive thick smoke, which reacts strongly when exposed to water, emitting irritating and corrosive hydrogen chloride gas, which can stimulate the eyes, skin and respiratory system when exposed, and the liquid can burn the eyes and skin. Patients who inhale gas should be removed from the contaminated area, placed to rest and keep warm, and in severe cases, seek medical treatment. Eye irritation can be washed with a large amount of water for 15 min, and serious cases can be treated for medical treatment. Skin contact is also rinsed with water, if there is burns, see a doctor for treatment. If you take it by mistake, you should rinse your mouth immediately, drink water and send it to the hospital for treatment.
Toxic boron trichloride can enter the human body from the respiratory tract and digestive tract and penetrate through the skin, corrode the eyes, respiratory mucosa, skin, endanger the liver, kidney and brain, and smoke poisonous smoke (it is produced by contact with water or air Corrosive smoke) can cause emphysema, which can be fatal in severe cases. Therefore, safety protection articles should be worn during operation to prevent serious injuries to respiratory tract and eyes. After poisoning, he quickly left the scene, rested in a semi-lying position, inhaled fresh air, took off the contaminated clothes, washed the contaminated place with a large amount of water, and sent the poisoned person to the hospital for treatment as soon as possible.
Chemical properties colorless transparent liquid with strong odor. Relative density 1.349(11 ℃). Melting point 107.3 ℃. Boiling point 12.5 ℃. When exposed to water, it decomposes to generate hydrogen chloride and boric acid, and releases a lot of heat, which generates smoke due to hydrolysis in humid air. Boron trichloride has strong reaction ability, can form a variety of coordination compounds, and has high thermodynamic stability, but under the action of discharge, it will decompose to form low-priced boron chloride. In the atmosphere, boron trichloride can react with glass and ceramics when heated, and can also react with many organic substances to form various organoboron compounds.
Uses can be used to manufacture high-purity boron, catalysts for organic synthesis, fluxes for silicate decomposition, and boronizing steel. It can also be used to make boron nitride and borane compounds.
Uses are mainly used in diffusion, ion implantation, dry etching and other processes used in the production of silicon semiconductor devices and integrated circuits in the electronic industry.
Uses Used as a doping source for semiconductor silicon, organic synthesis catalyst; also used for the preparation of high-purity boron and organoboron compounds
Uses for the preparation of fatty acid methyl esters and for the transesterification reaction of triglycerides.
The production method uses refined boron trichloride as a raw material, and is purified by adsorption and distillation to produce high-purity boron trichloride.
Production method The synthesis method puts the dry element boron powder into the reaction tube of the tubular reaction furnace, first uses inert gas to remove air, then heats to 300 ℃, introduces a small amount of chlorine, and when the temperature reaches 650 ℃, a large amount of chlorine is passed, The temperature is controlled at 650~750 ℃. The generated boron trichloride is cooled and collected by the receiver with dry ice, and then rectified to produce a finished product of boron trichloride. Its
2B 3C12→2BCl3
Category corrosion articles
Toxicity classification high toxicity
Acute toxicity inhalation-rat LC50: 2451 PPM/ 1 hour; inhalation-mouse LCL0: 20 PPM/ 7 hours
Hazard characteristics of flammability release toxic hydrogen chloride and boride gas when heated or exposed to water
Storage and transportation characteristics The warehouse is ventilated and dry at low temperature; it is stored separately from alkali and H-hole agent
Fire extinguishing agent dry sand, dry stone powder; prohibited water
safety information
dangerous goods signs T ,T,N,F
Hazard category code 14-26/28-36/37/38-40-67-65-62-51/53-48/20-34-11-50/53-26/27/28-63-39/23/24/25-24-21-10
Safety instructions 9-26-28-36/37/39-45-8-61-38-28A-16-1-60-33-23-7/9-62-36/37
Dangerous goods transportation number UN 3390 6.1/PG 1
WGK Germany 3
RTECS ED1925000
F 10-21
Hazard Note Very toxic
TSCA Yes
DOT Classification 2.3, Hazard Zone C (Gas poisonous by inhalation)
HazardClass 2.3
PackingGroup II
Customs code 28121049
Last Update：2024-04-10 22:29:15
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View History
Raw Materials for Boron trichloride
Downstream Products for Boron trichloride
Boron nitride
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PHENYLBORON DICHLORIDE
BORON SUBPHTHALOCYANINE CHLORIDE
Sulfur tetrachloride
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PHENYL PHOSPHORODICHLORIDITE
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Sulfur tetrachloride
Trioctyl borate
PHENYL PHOSPHORODICHLORIDITE
Borane-trimethylamine complex
TRIPHENYL BORATE
BORANE-N,N-DIETHYLANILINE COMPLEX