DI(T-BUTYLAMINO)SILANE

Name	Bis(t-butylamino)silane
Synonyms	DI(T-BUTYLAMINO)SILANE BIS(T-BUTYLAMINO)SILANE Bis(t-butylamino)silane DI-(TERT-BUTYLAMINO)SILANE N,N'-Bis(1,1-dimethylethyl)silanediamine Dl(t-Butylamino)silane bis (tert-butylamino)silane
CAS	186598-40-3

Molecular Formula	C8H22N2Si
Molar Mass	174.36
Density	0,816 g/cm3
Boling Point	167°C
Flash Point	30°C
Appearance	liquid
Specific Gravity	0.816
Color	colorless
pKa	11.91±0.70(Predicted)
Sensitive	moisture sensitive, store cold
Refractive Index	1.4236

TSCA

EPA chemical substance information	information provided by: ofmpeb.epa.gov (external link)
Use	bis (tert-butylamino) silane is a type of (BTBAS) silane coupling agent, BTBAS is a precursor of chemical vapor liquid chemistry that can deposit uniform silicon nitride and can be used to prepare Silicon nitride thin films, semiconductor devices, and shallow channel Isolation thin films.

Last Update：2024-04-10 22:29:15

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DI(T-BUTYLAMINO)SILANE

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