Name | Tetramethylammonium hydroxide |
Synonyms | nmd3 TMAH megapositcd14 Tetramethylammonium hydroxide hydroxydedetetramethylammonium Tetramethyl ammonium hydroxide n,n,n-trimethyl-methanaminiuhydroxide N,N,N-Trimethylmethanaminium Hydroxide Methanaminium,N,N,N-trimethyl-,hydroxide |
CAS | 75-59-2 104422-11-9 105468-35-7 123626-97-1 129653-91-4 129654-61-1 143549-79-5 154636-59-6 195460-1 |
EINECS | 200-882-9 |
InChI | InChI=1/C4H12N.H2O/c1-5(2,3)4;/h1-4H3;1H2/q+1;/p-1 |
InChIKey | WGTYBPLFGIVFAS-UHFFFAOYSA-M |
Molecular Formula | C4H13NO |
Molar Mass | 91.15 |
Density | 1.016 (25% aq.) |
Melting Point | °C |
Boling Point | 110℃ |
Flash Point | 6℃ |
Water Solubility | Soluble in water. |
Vapor Presure | 17.5 mm Hg ( 20 °C) |
Appearance | Morphological Solution, color APHA: ≤ 10 |
PH | >13 (H2O, 20°C) |
Storage Condition | Store below +30°C. |
Stability | Stable. Flammable. Incompatible with strong oxidizing agents, strong acids. |
Refractive Index | 1.3806 |
Physical and Chemical Properties |
|
Use | Used as a polarographic analysis reagent |
Hazard Symbols | T - Toxic C - Corrosive |
Risk Codes | R20/21/22 - Harmful by inhalation, in contact with skin and if swallowed. R34 - Causes burns |
Safety Description | S26 - In case of contact with eyes, rinse immediately with plenty of water and seek medical advice. S36/37/39 - Wear suitable protective clothing, gloves and eye/face protection. S45 - In case of accident or if you feel unwell, seek medical advice immediately (show the label whenever possible.) |
UN IDs | UN 1835 |
WGK Germany | 1 |
RTECS | PA0875000 |
FLUKA BRAND F CODES | 4.4-10-34 |
TSCA | Yes |
HS Code | 29239000 |
Hazard Class | 3 |
Packing Group | II |
Raw Materials | Tetramethylammonium chloride |
Downstream Products | Dimethicone Silicone rubber,methyl RTV 107 Poly(dimethylsiloxane) Tetramethylammonium acetate |
toxic substance data | 75-59-2(Hazardous Substances Data) |
sensitivity | Air Sensitive |
Merck | 14,9224 |
BRN | 3558708 |
EPA chemical information | Tetramethylammonium hydroxide (75-59-2) |
product description
tetramethylammonium hydroxide (Tetramethyl ammonium hydroxide,TMAH) is also known as tetramethylammonium hydroxide and tetramethylamine hydroxide. It is a colorless to light yellow liquid. It is the strongest organic alkali and is very easy to absorb moisture. It has a certain ammonia smell. It can quickly absorb carbon dioxide in the air. Its vapor pressure is low at room temperature, it is completely decomposed and gasified at 135~145 ℃, and the high. Tetramethylammonium hydroxide solution is colorless and transparent with slight ammonia odor. The PH value of 1(wt)% solution is 12.9, which is a strong alkali with the same strength as caustic alkali. Concentrate the aqueous solution of tetramethylammonium hydroxide under reduced pressure to obtain 5 hygroscopic needle crystals of crystal water, and then continue to concentrate and dehydrate to become 3 crystals of crystal water, and then become 1 crystal water of tetramethyl ammonium hydroxide, Decompose into trimethylamine and dimethyl ether at 135~140°C, and usually make 10% and 25% aqueous solutions.
preparation process
There are many methods for preparing tetramethylammonium hydroxide. Generally, the silver oxide method is used, which is formed by the reaction of tetramethylammonium chloride and silver oxide. However, the process of preparing tetramethylammonium hydroxide by this method is complicated, the raw material silver oxide is expensive, and the obtained product contains high impurity ions, such as halogen ions, alkali metal ions, etc., which are used for the catalytic polymerization of silicone monomers. It seriously affects the characteristics of silicone products and cannot meet the requirements of cleaning and corrosion in the electronic field.
The new process of preparing tetramethylammonium hydroxide by electrolysis has been adopted in foreign countries since the 1970s, and gradually replaced the silver oxide method. The products made by electrolysis method have good quality and low cost, which can not only meet the needs of silicone production, but also enter the field of electronic industry.
use
1.1. In terms of silicone, tetramethyl ammonium hydroxide is used as dimethyl silicone oil, amino silicone oil, benzmethyl silicone oil, silicone diffusion pump oil, and no solvent has silicon molding compound, silicone resin, Silicone rubber and other catalysts; 2. In terms of analysis, tetramethyl ammonium hydroxide is used as a polarographic reagent; 3. In terms of product purification, it is used as ashless alkali to precipitate many metal elements; 4. It is often used as brightener, cleaning agent and touch etching agent for computer silicon wafer surface in the production of organic silicon wafer. 5. In the printing of circuit boards and the manufacture of microscope sheets, it can be used as a cleaning agent for integrated circuit boards and an anisotropic etchant for si-sio2 interfaces in semiconductor micromachining technology. 6. Used as CMP process cleaning agent, IC.vlsi and TFI-LCD positive glue developer.
2. in terms of silicone, it is used as catalyst for dimethyl silicone oil, benzmethyl silicone oil, silicone diffusion pump oil, solvent-free silicone molding compound, silicone resin silicone rubber, etc. In terms of analysis, as a polarographic reagent, it is used as an ashless alkali to precipitate many metal elements in product purification. It is often used as a computer silicon wafer surface brightener, cleaning agent and touch etching agent in the production of organic silicon wafers. This product is a catalyst in silicone polymerization. Its advantages are: it is strongly alkaline and stable at a temperature not exceeding the decomposition point. It quickly decomposes to trimethylamine and methanol beyond the decomposition point. When the catalysis is completed, it is easy to remove without leaving any residue. No pollution to silicone products. Therefore, it is also called "temporary catalyst". In the analysis, it can be used for polarography and for precipitation of hydrides of many elements without ash.
3, catalysts in polymerization of silicone products such as amino silicone oil, 201methyl silicone oil and silicone rubber. When used in aqueous solution, it can be used as a catalyst for the synthesis of RTpeisi. It can also be used in polyester polymers, textiles, leather, wood processing, electronics, electroplating and other industries. It is also a polarographic experiment support liquid
4. In the electronics industry, it is widely used as silicon wafer etchant, cleaning agent, positive glue developer, etc.
5, used as brightener, touch etching agent, etc.
6, used as polarographic analysis reagent
category
corroded articles
toxicity classification
highly toxic
acute toxicity
subcutaneous-mouse LDL0: 19 mg/kg
explosive hazard characteristics
Corrosive to skin and cornea
flammability hazard characteristics
Vapor is toxic; combustion emits toxic nitrogen oxides and ammonia smoke
storage and transportation features
The warehouse is ventilated and dry at low temperature; it is stored separately from acids.
fire extinguishing agent
misty water, foam, sand