TRIMETHYLSILANE
Trimethylsilane
CAS: 993-07-7
Molecular Formula: C3H10Si
TRIMETHYLSILANE - Names and Identifiers
| Name | Trimethylsilane |
| Synonyms | TRIMETHYLSILANE Trimethylsilane trimethylsilicon SILICON TRIMETHYL Silane, trimethyl- Trimethylsilanegas Trimethylsilaneincylinder TRIMETHYLSILANE (IN CYLINDER) Trimethylsilyl hydride, 2-Methyl-2-silapropane |
| CAS | 993-07-7 |
| EINECS | 213-603-0 |
| InChI | InChI=1/C3H10Si/c1-4(2)3/h4H,1-3H3 |
TRIMETHYLSILANE - Physico-chemical Properties
| Molecular Formula | C3H10Si |
| Molar Mass | 74.2 |
| Density | 0,638 g/cm3 |
| Melting Point | -135,9°C |
| Boling Point | 6,7°C |
| Water Solubility | 1.4g/L at 20℃ |
| Vapor Presure | 1710mmHg at 25°C |
| Appearance | liquid |
| Specific Gravity | 0.638 |
| Sensitive | 3: reacts with aqueous base |
| Refractive Index | 1.3800 (estimate) |
| Physical and Chemical Properties | Trimethylsilane is a colorless liquid with a pungent odor, the vapor of which is heavier than air and may flow along the ground, causing a distant fire. |
TRIMETHYLSILANE - Risk and Safety
| Risk Codes | R12 - Extremely Flammable R36/37/38 - Irritating to eyes, respiratory system and skin. |
| Safety Description | S9 - Keep container in a well-ventilated place. S16 - Keep away from sources of ignition. S26 - In case of contact with eyes, rinse immediately with plenty of water and seek medical advice. S33 - Take precautionary measures against static discharges. |
| UN IDs | 3161 |
| TSCA | Yes |
TRIMETHYLSILANE - Reference Information
| LogP | 2.2 at 20℃ |
| EPA chemical substance information | information provided by: ofmpeb.epa.gov (external link) |
| Introduction | trimethylsilane, or trimethylsilyl, is an organosilicon compound. It is an extremely flammable substance. Trimethylsilane is used as a plasma-phase etchant in the semiconductor industry. |
| Application | trimethylsilane ((CH3)3SiH) has been used as an interlayer insulating film in the semiconductor field in recent years, its use is gradually expanding. |
Last Update：2024-04-10 22:29:15
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